Waferscale nanophotonic circuits made from diamond-on-insulator substrates
- Author: P. Rath, N. Gruhler, S. Khasminskaya, C. Nebel, C. Wild, and W. H. P. Pernice
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Abstract:
Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.