Waferscale nanophotonic circuits made from diamond-on-insulator substrates

  • Author: P. Rath, N. Gruhler, S. Khasminskaya, C. Nebel, C. Wild, and W. H. P. Pernice
  • Source:

    Optics Express, 21, Issue 9, 11031-11036 (2013)

  • Abstract:

    Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.