Speaker: Dr. Heiner Jaksch, Carl Zeiss, Oberkochen
Introduction: Dr. Torsten Scherer
Abstract:
Low loss electron contrast in the FE-SEM was first discovered and interpreted with the Zeiss GEMINI column.
Classical Rutherford or Mott scattering could be excluded for the observed imaging contrast.
This new field in the scanning electron microscopy with so far unknown interactions will be discussed in detail using
application examples.
