INT | Scanning Probe Lithography

High-Performance and Tailorable Pressure Sensor Based on Ultrathin Conductive Polymer Film

  • Author:

    Q. Shao, Z. Niu, M. Hirtz, L. Jiang, Y. Liu, Z. Wang, X. Chen 

  • Source:

    Small 10 (2014) 1466-1472

  • Date: 2014
  • A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.