Iliad Ultra (S)TEM

Integrated, advanced EELS and EDX spectroscopy with the Iliad EELS Spectrometer and Ultra-X EDX Detection System.
Dr. Kübel
Campus South- Iliad Ultra (S)TEM

Configuration    

  • Accelerating voltage (live switching): 30–300 kV

  • Electron source: Extreme brightness cold field emission gun (X-CFEG); HR and UHR options

  • Monochromator / High-resolution modes: HR (0.2 eV), UHR (0.025 eV at 60 kV)

  • Aberration correction: Probe-corrected STEM; image-corrected TEM information limit

  • EELS system: Iliad EELS Spectrometer + Zebra EELS Detector (5 strips, 10,000 spectra/s)

  • EDX system: Ultra-X Detection System (>4.45 sr solid angle, ≤136 eV resolution)

  • NanoPulser Electrostatic Beam Blanker (ns pulsing, scan synchronized mode)

  • Software: Velox (control + acquisition), AutoScript (automated workflows)

 

Resolution

  STEM resolution (probe corrected) STEM resolution at 30 kV (probe corrected) Information limit (image corrected)
EB: Extreme brightness cold field emission gun (X-CFEG)
50 pm @100 pA		 136 pm @100 pA 70 pm
HR: High energy resolution 50 pm @30 pA 125 pm @30 pA 60 pm
UHR: Ultra high energy resolution 50 pm @30 pA 125 pm @30 pA 60 pm

 

Imaging and Analysis Techniques      

  • TEM & STEM imaging

  • Aberration-corrected STEM (probe corrected)

  • High-resolution TEM (information-limit imaging)

  • EELS (high resolution & MultiEELS Mode, 1–5 ranges simultaneously)

  • EFTEM (optional)

  • EDX (Ultra-X Detection System, high solid angle)

  • Time-resolved experiments (NanoPulser ns-scale dose control)

  • Dose-efficient STEM imaging (scan-synchronized blanking)

  • Integrated spectral mapping: EELS + EDX

  • AI-assisted & automated workflows (AutoScript)