Configuration

• Operation Voltage:

  • High Tension SEM: 200 V - 30 kV

  • High Tension FIB: 3 kV - 30 kV      

• Source

  • FEG (Schottky)

  • Xenon Plasma Source

• Imaging Detectors:

  • InBeam SE, (energy filtered) BSE, mid-angle BSE

  • Retractable LBSE detector

  • Retractable STEM detector

• Gas Injection System (GIS)

  • Multi-GIS (W, Pt, XeF₂, C)

• Manipulators

  • Omniprobe 400 with independent x,y, z motion and rotation

Resolution

Imaging, Analysis and Sample Preparation Techniques      

• SE & BSE SEM analysis

• STEM imaging

• 3D Slice & View tomography

• TEM sample preparation

• Nanoscale deposition and contacting