TFS Helios 5CX

The TFS Helios 5CX system is a Ga-LMIS FIB that enables the preparation of cross sections, TEM-lamella, and APT samples. The availability of a cryo stage and a cryo-EasyLift manipulator allows a full cryo workflow for sample preparation. Additionally, the

Configuration

  • Operation Voltage:
    • High Tension SEM: 200 V - 30 kV
    • High Tension FIB: 500 V - 30 kV
  • Source
    • FEG (Schottky, Elstar Column)
    • Ga Liquid Ion Metal Source (LIMS, Tomahawk HT Ion Column)
  • Imaging Detectors:
    • SED (ETD, secondary electron detector, topography contrast)
    • InLens TLD with SE and BSED Modes (surface structure, material contrast)
    • In-column MD (BSE)
    • In-column ICD (SE/BSE)
    • ICE (for secondary electrons and ions)
    • STEM (for TEM like imaging)
    • In-Chamber Nav-Cam
    • Overview Camera
  • Gas Injection System (GIS) (each as single GIS)
    • W, Pt, C
  • Manipulators
    • TFS EasyLift with independent x, y, z motion and rotation
    • TFS EasyLift-Cryo with independent x, y, z motion (without rotation)
  • Cryo-Stage
    • T ≤ -170°C with rotation
  • CleanConnect for InertGas transfer (for sample transfer from Dualbeam to glove box using standard airlock on glove box)
  • NenoVision LiteScope AFM-in-SEM (usable with CleanConnect)

Resolution

  30 kV 15 kV 1 kV
Electron Beam [nm] 0.6 (STEM) 0.6 1.0
Ion Beam [nm] 4.0 (2.5 by selective edge method)   ≤ 200

Imaging, Analysis and Sample Preparation Techniques

  • SE & BSE SEM analysis
  • STEM imaging
  • TEM sample preparation
  • APT sample preparation
  • Nanoscale deposition and contacting
  • Cryo workflow for sample preparation
  • Inert gas transfer
  • AFM-in-SEM (incl. inert gas transfer)
KIT
TFS Helios 5